From: Stability and symmetry of ion-induced surface patterning
Parameter | Description | Quantity | Units |
---|---|---|---|
J | Ion flux | 5×1021 | [m] −2[s] −1 |
ε | Ion energy | 300 | [eV] |
a | Ion penetration depth | 2×10−9 | [m] |
β | Collision cascade dimension | 1×10−9 | [m] |
D 0 | Surface diffusivity | 2.4025×10−7 | [m] −2 |
γ | Surface free energy density | 2.9 | [J]/[m] −2 |
Ω | Atomic volume | 1.5825×10−29 | [m] 3 |
ρ s | Atomic surface density | 7.0811×1018 | [m] −2 |
T | Temperature | 500 | [K] |